We focus our attention on physical self-assembly induced by the “Dynamic Oblique Deposition” (DOD) technique and attempt to realize complex 3D nanostructures.
Phsical Self-assembly by DOD:
Designing Deposition Processes Using Original Growth Simulator:
Growth Simulator: VFiGS
M. Suzuki and Y. Taga, “Numerical study of the effective surface area of obliquely deposited thin films,” J. Appl. Phys. 90 (11), 5599-5605 (2001).
Deasign and Fabrication
K. Kaminska, M. Suzuki, K. Kimura, Y. Taga, and K. Robbie, “Simulating structure and optical response of vacuum evaporated porous rugate filters,” J. Appl. Phys. 95 (6), 3055-3062 (2004).